[ 대표논문 ]

• (2025) Introducing tris(trimethylsiloxy)silane as a new precursor for low-k thin films in plasma-enhanced chemical vapor deposition system. Journal of Materials Research. 40, 7
• (2024) Effects of Diethoxymethylsilane/Helium Flow Rate Ratio on Low-k Films Deposited by Plasma-Enhanced Chemical Vapor Deposition. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 13, 9
• (2024) Study on plasma-polymerized 1-(trimethylsilyl)pyrrolidine films deposited by plasma-enhanced chemical vapor deposition for use as a Cu diffusion barrier in multilevel metallization process. MICROELECTRONIC ENGINEERING. 291, 1
• (2024) High-temperature planar heating elements using RuO2 nanosheets. CERAMICS INTERNATIONAL. 50, 12
• (2024) Novel plasma-polymerized coating facilitates HeLa cell spheroid formation, exerting necroptosis via β-cyclodextrin-encapsulated resveratrol. JOURNAL OF ANALYTICAL SCIENCE AND TECHNOLOGY. 15, 5
• (2023) Change in Electrical/Mechanical Properties of Plasma Polymerized Low Dielectric Constant Films after Etching in CF4/O2 Plasma for Semiconductor Multilevel Interconnects. MATERIALS. 16, 13
• (2023) Inner surface modification of polyurethane ureteral stents using plasma-enhanced chemical vapor deposition to improve the resistance to encrustation in a pig model. INVESTIGATIVE AND CLINICAL UROLOGY. 64, 2
• (2022) Reduction time effect on the dielectric characteristics of reduced-graphene-oxide--encapsulated barium titanate powder fillers. CARBON. 199, 1
• (2022) Etching characteristics of low-k SiCOH thin films under fluorocarbon-based plasmas. Vacuum. 202, 1
• (2022) Enhancement of dielectric performance of encapsulation in barium titanate oxide using size-controlled reduced graphene oxide. RSC ADVANCES. 12, 26
• (2022) Inner surface modification of ureteral stent polyurethane tubes based by plasma-enhanced chemical vapor deposition to reduce encrustation and biofilm formation. BIOFOULING. 38, 5
• (2021) Plasma Polymerized SiCOH Films from Octamethylcyclotetrasiloxane by Dual Radio Frequency Inductively Coupled Plasma Chemical Vapor Deposition System. Journal of Nanoscience and Nanotechnology. 21, 8
• (2021) Study on Effects of Carrier Gas Flow Rate on Properties of Low Dielectric Constant Film Deposited by Plasma Enhanced Chemical Vapor Deposition Using the Octamethylcyclotetrasiloxane Precursor. Journal of Nanoscience and Nanotechnology. 21, 8
• (2021) Enhanced culturing of adipose derived mesenchymal stem cells on surface modified polystyrene Petri dishes fabricated by plasma enhanced chemical vapor deposition system. JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART B-APPLIED BIOMATERIALS. 110, 2
• (2021) Ultralow dielectric constant SiCOH films by plasma enhanced chemical vapor deposition of decamethylcyclopentasiloxane and tetrakis(trimethylsilyloxy)silane precursors. THIN SOLID FILMS. 727, 1
• (2021) Characterization of Flexible Low-k Dielectric SiCOH Films Prepared by Plasma-Enhanced Chemical Vapor Deposition of Tetrakis(trimethylsilyloxy)Silane Precursor. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. 21, 4
• (2020) One-step fabrication method of non-fouling amine-functionalized polyethylene glycol thin film using a single precursor through plasma-enhanced chemical vapor deposition. SURFACE & COATINGS TECHNOLOGY. 403
• (2020) Dielectric characteristics of graphene-encapsulated barium titanate polymer composites. MATERIALS CHEMISTRY AND PHYSICS. 255
• (2020) Dielectric characteristics of graphene-encapsulated barium titanate polymer composites.. MATERIALS CHEMISTRY AND PHYSICS. 255, -
• (2020) Characterization of Bilayer Organic Solar Cells with Carbon Nanotubes Using Impedance Analysis. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. 20, 11
• (2020) Effects of He/H(2)( )Plasma Treatment on Properties o f SiCOH Films Deposited with the 1,1 1,3,5,7,7,7-Octamethyl-3,5-Bis(Trimethylsiloxy) Tetrasiloxane Precursor. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. 20, 11